High speed single- and dual-stage vertical positioners

Title: High speed single- and dual-stage vertical positioners
Creator: Yong, Yuen K.; Wadikhaye, Sachin P.; Fleming, Andrew J.
Relation: ARC.DE130100879 & ARC. DP150103521
Relation: Review of Scientific Instruments Vol. 87, Issue 8
Publisher Link: http://dx.doi.org/10.1063/1.4960080
Publisher: AIP Publishing
Resource Type: journal article
Date: 2016
Description: This article presents a high-speed single- and dual-stage vertical positioners for applications in optical systems. Each positioner employs a unique end-constraint method with orthogonal flexures to preload a piezoelectric stack actuator. This end-constraint method also significantly increases the first mechanical resonance frequency. The single-stage positioner has a displacement range of 7.6 µm and a first resonance frequency of 46.8 kHz. The dual-stage design consists of a long-range slow-stage and a short-range fast-stage. An inertial counterbalance technique was implemented on the fast-stage to cancel inertial forces resulting from high-speed motion. The dual-stage positioner has a combined travel range of approximately 10 µm and a first evident resonance frequency of 130 kHz.
Subject: vertical positioners; optical systems; piezoelectric stack actuator
Identifier: http://hdl.handle.net/1959.13/1329249
Identifier: uon:26109
Identifier: ISSN:0034-6748
Language: eng
Reviewed

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